Critical Strain for Surface Nucleation of Dislocations in Silicon

Abstract

A long-standing discrepancy exists between experiments and atomistic models concerning the critical strain needed for surface nucleation of dislocations in silicon-germanium systems. While dislocation nucleation is readily observed in hetero-epitaxial thin films with misfit strains less than 4%, existing atomistic models predict that a critical strain over 7.8% is needed to overcome the kinetic barrier for dislocation nucleation. Using zero-temperature energy barrier calculations and finite-temperature Molecular Dynamics simulations, we show that 3-dimensional surface features such as a sharply bent step can lower the predicted critical nucleation strain of a shuffle-set dislocation to 6.4%, and that of a shuffle-glide dislocation complex to 5.3%. Consistent findings are obtained using both the Stillinger-Weber (SW) and modified embedded-atom method (MEAM) potentials, providing support to the physical relevance of the shuffle-glide dislocation complex, which was previously considered as an artifact of the SW potential.