Chemical Characterization of Aerosol Particles Using On-chip Photonic Cavity Enhanced Spectroscopy

Abstract

We demonstrate the chemical characterization of aerosol particles with on-chip spectroscopy using a photonic cavity enhanced silicon nitride (Si3N4) racetrack resonator-based sensor. The sensor operates over a broad and continuous wavelength range, showing cavity enhanced sensitivity at specific resonant wavelengths. Analysis of the relative change in the quality factor of the cavity resonances successfully yields the absorption spectrum of the aerosol particles deposited on the resonators. Detection of N-methyl aniline-based aerosol detection in the Near InfraRed (NIR) range of 1500 nm to 1600 nm is demonstrated. Our aerosol sensor spectral data compares favorably with that from a commercial spectrometer, indicating good accuracy. The small size of the device is advantageous in remote, environmental, medical and body-wearable sensing applications.