Swept-Frequency Drumhead Mechanical Resonators

Abstract

We demonstrate a high-Q ($>5 \times 10^{6}$) swept-frequency membrane mechanical resonator achieving octave resonance tuning via an integrated heater and an unprecedented acceleration noise floor below 1 $\mu$g Hz$^{-1/2}$ for frequencies above 50 kHz. This device is compatible with established batch fabrication techniques, and its optical readout is compatible with low-coherence light sources (e.g., a monochromatic light-emitting diode). The device can also be mechanically stabilized (or driven) with the same light source via bolometric optomechanics, and we demonstrate laser cooling from room temperature to 10 K. Finally, this method of frequency tuning is well-suited to fundamental studies of mechanical dissipation; in particular, we recover the dissipation spectra of many modes, identifying material damping and coupling to substrate resonances as the dominant loss mechanisms.