3-omega method for thermal properties of thin film multilayers

Abstract

Short review on the different models for the electro-thermal 3-omega method. We present the deduction of the fundamental relation between the 3-omega voltage with the temperature rise to determine the thermal conductivity. The usage of the anisotropy of the films allows a smooth transition between 1D and 2D models. A comparison between the multilayer methods and analytical solutions are presented.

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