Tabletop single-shot extreme ultraviolet Fourier transform holography of an extended object

Abstract

We demonstrate single and multi-shot Fourier transform holography with the use of a tabletop extreme ultraviolet laser. The reference wave was produced by a Fresnel zone plate with a central opening that allowed the incident beam to illuminate the sample directly. The high reference wave intensity allows for larger objects to be imaged compared to mask-based lensless Fourier transform holography techniques. We obtain a spatial resolution of 169 nm from a single laser pulse and a resolution of 128 nm from an accumulation of 20 laser pulses for an object ~11x11μm 2 in size. This experiment utilized a tabletop extreme ultraviolet laser that produces a highly coherent ~1.2 ns laser pulse at 46.9 nm wavelength.

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