Quasi one-shot full-field surface profilometry using digital diffractive-confocal imaging correlation microscope

Abstract

One-shot full-field surface profilometry using digital diffractive-confocal imaging correlation microscope based on digital micromirror device is developed for one-shot microscopic 3D surface measurement. Optical configuration applies confocal microscope setup and was building on DMD to generate specific pinhole array arrangement for minimizing cross talk effect. An innovative method was invented to create normalized cross correlation depth response curve from diffraction patterns of the pinhole. Using this approach, the sub-micrometer scale depth can be detected with high accuracy and precision.