Direct Measurement of the Electron Beam Intensity Profile via Carbon Nanotube Tomography

Abstract

Electron microscopes have been improved to achieve ever smaller beam spots, a key parameter that determines the instrument's resolution. The techniques to measure the size of the beam, however, have not progressed to the same degree. There is an on-going need to develop detection technologies that can potentially characterize the smallest electron beam to further improve the capabilities of these instruments. We report on a new electron beam detector based on a single-walled carbon nanotube. Nanotubes are atomically smooth, have a well-defined diameter that is similar in size to the finest electron probes and can be used to directly measure the beam profile. By scanning the beam at different angles to the nanotube, we can accurately determine the spatial profile of an electron beam by applying tomographic reconstruction techniques.