A Synchrotron in the TEM: Spatially Resolved Fine Structure Spectra at High Energies

Abstract

Fine structure analysis of core electron excitation spectra is a cornerstone characterization technique across the physical sciences. Spectra are most commonly measured with synchrotron radiation and X-ray spot sizes on the {\mu}m to mm scale. Alternatively, electron energy loss spectroscopy (EELS) in the (scanning) transmission electron microscope ((S)TEM) offers over a 1000 fold increase in spatial resolution, a transformative advantage for studies of nanostructured materials. However, EELS applicability is generally limited to excitations below ~2 keV, i.e., mostly to elements in just the first three rows of the periodic table. Here, using state-of-the-art EELS instrumentation, we present nm resolved fine structure EELS measurements out to an unprecedented 12 keV with signal-to-noise ratio rivaling that of a synchrotron. We showcase the advantages of this technique in exemplary experiments.