Stress-controlled frequency tuning and parametric amplification of the vibrations of coupled nanomembranes

Abstract

Noninvasive tuning of the mechanical resonance frequencies of suspended parallel nanomembranes in various monolithic arrays is achieved by piezoelectric control of their tensile stress. Parametric amplification of their thermal fluctuations is shown to be enhanced by the piezoelectric actuation and amplification factors of up to 20 dB in the sub-parametric oscillation threshold regime are observed.