Chemical Sensing with Nanogap AND Chemi-mechanical Devices

Abstract

This article presents a new class of batch-fabricated, low-power and highly sensitive chemiresistive sensors. We first present the design, fabrication and characterization of batch-fabricated sidewall etched vertical nanogap tunnelling-junctions for bio-sensing. Using these devices we demonstrate the electrical detection of certain organic molecules from measurements of tunneling characteristics of target-mediated molecular junctions formed across nanogaps.