A Very-High-Velocity Acoustic Wave on a LiNbO3/Sapphire Substrate for Use in Sub-6-GHz Devices
Abstract
This letter presents a numerical investigation of acoustic modes propagating in an LiNbO3/sapphire substrate under a periodic Al grating, demonstrating the occurrence of longitudinal leaky SAWs (LLSAWs) with a unique combination of very high velocities exceeding 10 000 m/s, an electromechanical coupling coefficients of 4.5%, and negligible leakage into the substrate. The leakage was suppressed by optimizing the LiNbO3 (LN) plate and Al electrode thickness. Compared with conventional SAW substrates, the LN/sapphire substrate offers 2- to 2.5-fold higher frequencies for periodic electrode structures and enables the production of 6-GHz devices by standard photolithographic processes. Moreover, the required LN plate and Al electrode thicknesses remain compatible with existing wafer bonding technologies. An analysis of LLSAW dispersion in a resonator reveals that the wave behaves as a perfect Rayleigh SAW unperturbed by interactions with spurious modes. The found optimal LN/sapphire substrates are perfect candidates for high-performance SAW devices operating in the sub-6-GHz spectrum.
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