High-quality Tailored-edge Cleaving Using Aberration-corrected Bessel-like Beams

Abstract

We report on the usage of ultrashort laser pulses in form of aberration-corrected Bessel-like beams for laser cutting of glass with bevels. Our approach foresees to incline the material's entrance surface with respect to the processing optics. The detailed analysis of phase distortions caused by the beam transition through the tilted glass surface allows to pre-compensate occurring aberrations using digital holography. We verify theoretical considerations by means of pump-probe microscopy and present high-quality edges in non-strengthened silicate glass.