Investigation of the effects of customized electrodes on capacitively coupled radio frequency microplasma jets using emission spectroscopy and laser diagnostics

Abstract

The aim of this work is to investigate the effects of customized electrodes on the electron heating dynamics of the COST-Jet. The COST-Jet is operated with an applied sinusoidal alternating voltage of 13.56 MHz. With the help of phase resolved optical emission spectroscopy (PROES), the electron heating dynamics in the plasma discharge for customized electrodes, gas mixtures and applied voltage amplitudes are examined. The absolute densities of atomic oxygen are then examined using two photon laser induced fluorescence spectroscopy (TALIF) in order to obtain information on the production of reactive particles depending on the different electrode materials and structures.