A Numerical Analysis of a Micro-scale Piezoelectric Cantilever Beam: the Effect of Dimension Parameters on the Eigen Frequency

Abstract

Eigen frequency is one of the most important system responses to be considered while designing a micro-scale piezoelectric cantilever beam. This paper investigates and analyzes the effect of dimension parameters of a micro-scale piezoelectric cantilever beam on its eigen frequency. The beam is assumed to be made of silicon. Structural mechanics based finite element analysis is carried out in the environment of COMSOL Multiphysics software for the study. It is seen that length and thickness have continuous effect on the eigen frequency; whereas, the effect of width is discontinuous.