Visualization of Acoustic Power Flow in Suspended Thin-film Lithium Niobate Phononic Devices

Abstract

We report direct visualization of gigahertz-frequency acoustic waves in lithium niobate phononic circuits. Primary propagation parameters, such as the power flow angle (PFA) and propagation loss (PL), are measured by transmission-mode microwave impedance microscopy (TMIM). Using fast Fourier transform, we can separately analyze forward and backward propagating waves and quantitatively evaluate the propagation loss. Our work provides insightful information on the propagation, diffraction, and attenuation in piezoelectric thin films, which is highly desirable for designing and optimizing phononic devices for microwave signal processing.