Fabrication and characterization of suspended microstructures of ultrananocrystalline diamond
Abstract
The fabrication of various suspended microstructures made from ultra-nanocrystalline diamond was performed without sacrificial layer. Arrays of bridges and cantilevers of various dimensions were successfully fabricated by a well-controlled process. Mechanical characterizations and finite element calculations allowed us to estimate both the Young's modulus as well as the residual stress built in the ultra-nanocrystalline diamond film.
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