Soft-clamped silicon nitride string resonators at millikelvin temperatures
Abstract
We demonstrate that soft-clamped silicon nitride strings with large aspect ratio can be operated at temperatures. The quality factors (Q) of two measured devices show consistent dependency on the cryostat temperature, with soft-clamped mechanical modes reaching Q > 109 at 46~mK. For low optical readout power, Q is found to saturate, indicating good thermalization between the sample and the stage it is mounted on. Our best device exhibits a force sensitivity of 9.6~zN/Hz and a thermal decoherence time of 0.38~s which bode well for future applications such as nanomechanical force sensing and beyond.
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