Relaxation and dynamics of high-stress pre-displaced string resonators

Abstract

Pre-displaced micromechanical resonators made from high-stress material give rise to new rich static and dynamic behavior. Here, an analytical model is presented to describe the mechanics of such pre-displaced resonators. The bending and tension energies are derived and a modified Euler-Bernoulli equation is obtained by applying the least action principle. By projecting the model onto a cosine shape, the energy landscape is visualized, and the pre-displacement dependence of stress and frequency is studied semi-analytically. The analysis is extended with finite-element simulations, including the mode shape, the role of overhang, and the stress distribution.