A Novel Buckle-Free Large Rib Microdisk with Sub-Micron Thickness

Abstract

Thin large microdisks, that are key for dense spectral microcomb generation at visible to UV wavelengths, face challenges in fabrication. One of the most difficult issues is the buckling effect that significantly reduces the cavity optical quality factor. This work introduces a novel rib disk structure that significantly mitigates the buckling effects. Using this approach, we obtained millimeter size buckle-free microdisks with sub-micron thickness and high optical quality factor exceeding $10^7$.