Clamped and sideband-resolved silicon optomechanical crystals

Abstract

Optomechanical crystals (OMCs) are a promising and versatile platform for transduction between mechanical and optical fields. However, the release from the substrate used in conventional suspended OMCs also prevents heat-carrying noise phonons from rapidly leaking away. Thermal anchoring may be improved by attaching the OMCs directly to the substrate. Previous work towards such clamped, i.e. non-suspended, OMCs suffers from weak interaction rates and insufficient lifetimes. Here, we present a new class of clamped OMCs realizing -- for the first time -- optomechanical interactions in the resolved-sideband regime required for quantum transduction. Our approach leverages high-wavevector mechanical modes outside the continuum. We observe a record zero-point optomechanical coupling rate of $g_0/(2\pi) \approx 0.50$ MHz along with a sevenfold improvement in the single-photon cooperativity of clamped OMCs. Our devices operate at frequencies commonly used in superconducting qubits. This opens a new avenue using clamped OMCs in both classical and quantum communications, sensing, and computation through scalable mechanical circuitry that couples strongly to light.