Theoretical Analysis of Quartz Plate Acoustic Wave Resonators and Sensors Using Three-Dimensional Equations of Anisotropic Elasticity or Piezoelectricity

Abstract

This is a review of theoretical results from the three-dimensional equations of anisotropic elasticity or linear piezoelectricity on waves and vibrations in quartz crystal plates. It covers both the classical results on acoustic wave resonators and the relatively new applications in acoustic wave sensors. It discusses the basic thickness modes with various complications due to electrodes, mass loading, contact with fluids, and air gaps, etc. as well as the more complicated transversely varying modes. These results are fundamental for the understanding and design optimization of the widely used quartz crystal plate resonators and sensors.