Design parameters of free-form color routers for subwavelength pixelated CMOS image sensors

Abstract

Metasurface-based color routers are emerging as next-generation optical components for image sensors, replacing classical color filters and microlens arrays. In this work, we report how the design parameters such as the device dimensions and refractive indices of the dielectrics affect the optical efficiency of the color routers. Also, we report how the design grid resolution parameters affect the optical efficiency and discover that the fabrication of a color router is possible even in legacy fabrication facilities with low structure resolutions.