Millimeter-Wave Reflectionless Filters Using Advanced Thin-Film Fabrication
Abstract
We report on the development of millimeter-wave, lumped-element reflectionless filters using an advanced thin-film fabrication process. Based on previously demonstrated circuit topologies capable of achieving 50 impedance match at all frequencies, these circuits have been implemented at higher frequencies than ever before by leveraging a thin-film process with better than 2 μm feature size and integrated elements such as SiN Metal-Insulator-Metal (MIM) capacitors, bridges, and TaN Thin-Film Resistors (TFRs).
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