Microfabricated pinholes for high contrast imaging testbeds

Abstract

In order to reach contrast ratios of $10^{-8}$ and beyond, coronagraph testbeds need source optics that reliably emulate nearly-point-like starlight, with microfabricated pinholes being a compelling solution. To verify, a physical optics model of the Space Coronagraph Optical Bench (SCoOB) source optics, including a finite-difference time-domain (FDTD) pinhole simulation, was created. The results of the FDTD simulation show waveguide-like behavior of pinholes. We designed and fabricated microfabricated pinholes for SCoOB made from an aluminum overcoated silicon nitride film overhanging a silicon wafer substrate, and report characterization of the completed pinholes.