Practical Classical Molecular Dynamics Simulations for Low-Temperature Plasma Processing: A review

Abstract

Molecular Dynamics simulations are becoming a powerful tool for examining and predicting atomic and molecular processes in various environment. The present review shows how, in the fields of plasma physics, chemistry and interactions with materials and or liquids, Molecular Dynamics simulations are able to provide significant insights into various processes, among them: gas phase polymerization, deposition, plasma-catalysis, discharge breakdown, vibrational excitation.