Tantalum electrodeposition using a nanoporous anodic alumina template and a nanostructured gold/nickel-chromium glass-ceramic substrate

Abstract

Electrodeposition of tantalum coating was performed from an ionic liquid, BMP[Tf2N], in the presence of dissolved anhydrous TaF5 and LiF. Superficial X-ray photoelectron spectroscopy supplemented by an argon ion etching and depth profiling has proven the presence of the tantalum metal inside a thin coating deposited via a porous anodic alumina template. Additionally, tantalum electrodeposition was attempted using a planar sputter-deposited gold coating on a glass-ceramic substrate as the working electrode. Pores emerged within the sputter-deposited gold layer after the Ta electrodeposition step. Nano- to submicrometer large pores were created due to aluminum impurity diffusion through the gold and consequent etching effect of fluorides in the ionic liquid solution. Nanostructured tantalum and nanoporous gold are attractive materials with potential applications in high-performance electronic devices, including sensors, electrocatalysis, and energy storage systems.