Optimizing Josephson Junction Reproducibility in 30 kV E-beam Lithography: Analysis of Backscattered Electron Distribution

Abstract

This paper explores methods to enhance the reproducibility of Josephson junctions, crucial elements in superconducting quantum technologies, when employing the Dolan technique in 30 kV e-beam processes. The study explores the influence of dose distribution along the bridge area on reproducibility, addressing challenges related to fabrication sensitivity. Experimental methods include E-beam lithography, with electron trajectory simulations shedding light on backscattered electron behavior. We demonstrate the fabrication of different junction geometries, revealing that some geometries significantly improve reproducibility by resulting in a more homogeneous dose distribution over the junction area.