Nanometer Scanning with Micrometer Sensing: Beating Quantization Constraints in Lissajous Trajectory Tracking

Abstract

This paper addresses the task of tracking Lissajous trajectories in the presence of quantized positioning sensors. To do so, theoretical results on tracking of continuous time periodic signals in the presence of output quantization are provided. With these results in hand, the application to Lissajous tracking is explored. The method proposed relies on the internal model principle and dispenses perfect knowledge of the system equations. Numerical results show that an arbitrary small scanning resolution is achievable despite large sensor quantization intervals.