Low-Loss Silicon Directional Coupler with Arbitrary Coupling Ratios for Broadband Wavelength Operation Based on Bent Waveguides

Abstract

We demonstrate a design for a high-performance $2 \times 2$ splitter meeting the essential requirements of broadband coupling, support for arbitrary coupling ratio, ultra low-loss, high fabrication tolerance, and a compact footprint. This is achieved based on a rigorous coupled mode theory analysis of the broadband response of the bent directional coupler (DC) and by demonstrating a full coupling model, with measured broadband values of 0.4, 0.5, 0.6, and 0.7. As a benchmark, we demonstrate a 0.5:0.5 splitter that significantly reduces coupling variation from 0.391 in the traditional DC to just 0.051 over an 80 nm wavelength span. This represents a remarkable 7.67 times reduction in coupling variation. Further, newly-invented low-loss bends were used in the proposed design leading to an ultra low-loss design with negligible excess loss ($\mathrm{0.003 \pm 0.013 \ dB}$). The proposed 0.5:0.5 silicon strip waveguide-based design is tolerant and shows consistently low coupling variation over a full 300 mm wafer showcasing a maximum cross coupling variation of 0.112 over 80 nm wavelength range, at the extreme edge of the wafer. Futhermore, we augmented the wafer mapping with a waveguide width fabrication tolerance study, confirming the tolerance of the device with a mere 0.061 maximum coupling variation with a waveguide width deviation of $\pm 20$ nm over 80 nm wavelength range. These specs make the proposed splitter an attractive component for practical applications with mass production.