A system built for both deterministic transfer processes and contact photolithography

Abstract

A home-built compact system that functions as both a transfer stage for deterministic transfer processes and a mask aligner for contact photolithography, is constructed. The precision translation sample stage and optical microscope are shared between the two modes. In the transfer mode, assisted by either an adhesive or a heating element, the setup has been used to deterministically transfer freestanding semiconductors, 2D materials, and van der Waals electrodes. When configured in photolithography mode, the proposed instrument has been employed to fabricate various micro-scale patterns and devices, with minimum feature sizes of ~1-2 um achieved. Our prototype instrument provides a feasible solution for preforming high quality deterministic transfer and photolithography processes on one single tool in house.