Thermal stability and phase transformation of $\alpha$-, $\kappa(\epsilon)$-, and $\gamma$-Ga$_2$O$_3$ thin films to $\beta$-Ga$_2$O$_3$ under various ambient conditions

Abstract

Phase transitions in metastable $\alpha$-, $\kappa(\epsilon)$-, and $\gamma$-Ga$_2$O$_3$ films to thermodynamically stable $\beta$-Ga$_2$O$_3$ during annealing in air, N$_2$, and vacuum have been systematically investigated via in-situ high-temperature X-ray diffraction and scanning electron microscopy. These respective polymorphs exhibited thermal stability to around 471-525$^\circ$C, 773-825$^\circ$C, and 490-575$^\circ$C before transforming into $\beta$-Ga$_2$O$_3$, across all tested ambient conditions. Particular crystallographic orientation relationships were observed before and after the phase transitions, i.e., (0006) $\alpha$-Ga$_2$O$_3$ $\parallel$ $(\overline{4}02)$ $\beta$-Ga$_2$O$_3$, (004) $\kappa(\epsilon)$-Ga$_2$O$_3$ $\parallel$ (310) and $(\overline{4}02)$ $\beta$-Ga$_2$O$_3$, and (400) $\gamma$-Ga$_2$O$_3$ $\parallel$ (400) $\beta$-Ga$_2$O$_3$. The phase transition of $\alpha$-Ga$_2$O$_3$ to $\beta$-Ga$_2$O$_3$ resulted in catastrophic damage to the film and upheaval of the surface. The respective primary and possibly secondary causes of this damage are the +8.6% volume expansion and the dual displacive and reconstructive transformations that occur during this transition. The $\kappa(\epsilon)$- and $\gamma$-Ga$_2$O$_3$ films converted to $\beta$-Ga$_2$O$_3$ via singular reconstructive transformations with small changes in volume and unchanged surface microstructures.