Preparation of Sol-Gel Random Micro Lens Array

Abstract

The structure of random micro lens array (rMLA) breaks the periodicity of micro lens array (MLA), suppressing coherence in the homogenization process, thereby achieving better spot homogenization effects. Sol-gel rMLA exhibits strong adaptability and high laser tolerance, making it valuable for laser beam control applications. However, the cracking tendency during the drying process of sol-gel is a challenge. This paper successfully prepares sol-gel random micro lens arrays through nanoimprint lithography, thoroughly analyzing the cracking mechanism and resolving the cracking issue during the drying process of sol-gel. The manufactured sol-gel random micro lenses exhibit good surface profile accuracy, uniformity, and excellent light source shaping effects. The energy utilization efficiency of various types of rMLA is approximately 90%, with rectangular and hexagonal rMLAs achieving uniformity of light spots of over 80%.