High-quality imaging of large areas through path-difference ptychography

Abstract

Tilting planar samples for multi-zone-axes observation is a routine procedure in electron microscopy. However, this process invariably introduces optical path differences in the electron beam across different sample positions, significantly compromising image quality, particularly over large fields of view. To address this challenge, we developed path difference ptychography (PDP), a method capable of decoupling path differences from the four-dimensional data during reconstruction. This enables the acquisition of high-quality, large-scale images, facilitating a more comprehensive understanding and analysis of materials microstructure. Moreover, PDP has the potential to promote the widespread application of ptychographic tomography in the analysis of planar samples.