Synaptic MIS Silicon Nitride Resistance Switching Memory Cells on SOI Substrate

Abstract

In this work, the comparison of resistive memory MIS single-cells without selector (1R), having silicon nitride as switching dielectric, fabricated on SOI and bulk Si wafers is demonstrated. Comprehensive experimental investigations reveal the advantage of SOI substrate over bulk Si in terms of cycling endurance, cell-to-cell variability, retention and data loss rate.