Enhanced chemical vapour deposition of monolayer MoS2 films via a clean promoter

Abstract

Two-dimensional (2D) transition metal dichalcogenides (TMDCs), exemplified by molybdenum disulfide (MoS2), have shown exceptional potential for data-centred, energy-efficient electronic applications due to their unique electrical, optoelectronic, and mechanical properties. However, challenges such as the controllable synthesis of high-quality, large-area 2D MoS2 films and the mitigation of contamination during growth remain significant barriers to their integration into advanced technologies. Here, we developed a novel contamination-free growth promoter, enabling the clean and scalable synthesis of high quality 2D MoS2 with desirable grain structures via chemical vapour deposition (CVD). By optimising the reactant concentration and S/Mo ratio, we achieved promoter-dominated enhanced growth with enhanced quality, as evidenced by the increased MoS2 flake size and coverage, alongside a strong PL A exciton peak at 1.84 eV, matching that of the mechanically exfoliated sample. This approach facilitates the clean and site-specific growth of high-quality 2D MoS2, establishing a robust pathway for the practical implementation of 2D MoS2 in next-generation electronic devices.