Stability, growth, and doping of In$_{2}$(Si, Ge)$_{2}$O$_{7}$ as promising n-type wide-gap semiconductors

Abstract

In this paper we investigate, computationally and experimentally, the phase stability, electronic structure properties, and the propensity for n-type doping of In$_{2}$X$_{2}$O$_{7}$ (X=Si, Ge) ternary oxides. This family of materials contains promising novel wide-gap semiconductors based on their estimated high $n$-type Baliga figures of merit and acceptable thermal conductivity for power electronics applications. Here, we find that both In$_{2}$Si$_{2}$O$_{7}$ and In$_{2}$Ge$_{2}$O$_{7}$ to be n-type dopable, with Zr providing between 10$^{16}$ and above 10$^{21}$ cm$^{-3}$ net donor concentrations under O-poor conditions, depending on the chemistry, structure (ground-state thorvetite or high-pressure pyrochlore) and synthesis temperature. Initial thin-film growth and annealing leads to polycrystalline In$_{2}$Ge$_{2}$O$_{7}$ thin films in thorvetite structure with band gap over 4 eV, and confirms Zr doping predictions by achieving electron concentrations at 10$^{14}$-10$^{16}$ cm$^{-3}$ under O-rich condition. While future epitaxial growth development is still needed, this study establishes In$_{2}$X$_{2}$O$_{7}$ as promising n-type wide-gap semiconductors for power electronic applications.