Modeling Practical Capacitive Structures for Electronic and Dielectric Property Extraction and Analysis

Abstract

A method for modeling the full steady-state and small-signal behavior of practical capacitive structures, such as metal-insulator-metal capacitors, diodes, and transistors, is presented. Simple lumped element models fail to properly represent the behavior of most practical structures, resulting in incorrect electronic material property extraction and evaluation. The methodology and model presented in this paper properly characterizes practical structures and can be employed to more accurately understand and evaluate experimental results, extract various electronic and dielectric properties of the constituent materials, and predict possible behavior of new structures and materials. The impact of dielectric properties (e.g., real versus complex permittivity, conductance, Cole-Cole dielectric response) and geometry on observed behavior of practical structures, especially with regard to extracting correct property values, is discussed.