Polarity-dependent Electroadhesion at Silicon Interfaces with Nanoscale Roughness

Abstract

We measure and model electroadhesion across multi-asperity silicon interfaces with nanometer scale roughness. When electrically biased, our naturally oxidized silicon interfaces display a leakage current consistent with the Fowler-Nordheim model and electroadhesion that can be successfully captured using a boundary element contact model. We show that polysilicon exhibits electroadhesion only under positive bias applied to the substrate monocrystalline wafer, which we interpret as a result of the reduced mobility of holes, with respect to electrons, within polysilicon. Overall, our findings reveal that electrostatic interactions can significantly enhance adhesion and friction between stiff and smooth surfaces, which can be important for example in precision positioning applications.