MEMS chip-based single proof-mass triaxial fiber-optic accelerometer with ultra-low noise level

Abstract

High-precision triaxial acceleration detection holds critical applications in seismic wave detection, geological resource exploration, and aerospace systems. Fabry-Perot (FP) optical sensors have gained widespread adoption in these domains due to their compact footprint and immunity to electromagnetic interference. Nevertheless, conventional three-axis measurements predominantly rely on assembling multiple single-axis transducers, introducing limitations such as increased device volume and misalignment errors. In this paper, we demonstrate a MEMS based monolithically integrated triaxial optical accelerometer that integrates a compact size with minimal noise and low crosstalk. The triaxial sensing structure employs a shared proof mass, achieving significant miniaturization compared to conventional multi-chip assembled triaxial optical accelerometers. In-plane sensing is realized through folded spring beams, while out-of-plane detection utilizes U-shaped suspension beams with widened central segments to suppress cross-axis sensitivity and enhance mechanical responsivity. Experimental results demonstrate that an operational bandwidth of 1\sim35 Hz, a minimum detectable acceleration of 4.12 ng/\sqrt{Hz}, and crosstalk below 0.023\%. The compact sensor footprint measures 16 mm \times 16 mm \times 0.5 mm. This optical accelerometer achieves nano-g resolution in the three-axis direction, demonstrating strong potential for applications in seismic wave detection and other precision vibration monitoring fields.