An 11.7-GHz ScAlN FBAR Filter: Case Study on Scaling Limits and Challenges

Abstract

This paper reports an 11.7 GHz compact 50 ohm ladder filter based on single layer Scandium Aluminum Nitride (ScAlN) film bulk acoustic resonators (FBARs) with platinum (Pt) electrodes, and uses it as a quantitative case study of the limits encountered when directly scaling to higher frequencies. The measured filter achieves a 3 dB fractional bandwidth (FBW) of 4.0% and an out of band rejection greater than 23.1 dB, with a minimum insertion loss (IL) of 6.8 dB. We analyze the origin of this performance through a quantitative framework: (1) a loss decomposition study, (2) frequency shift sensitivity that explains the discrepancy between simulated and measured center frequency, (3) FBW sensitivity to series shunt separation and port impedance, and (4) stress limited aperture that constrains device size. The results establish a realistic, fabricable baseline for directly scaled single layer ScAlN FBAR filters and outline materials, electrode, and stress management directions toward lower loss mmWave acoustic filters.