Shallow Au Implantation Into Silicon-On-Insulator Slot Ring Resonator Waveguide Devices

Abstract

The optical transmission spectra of a series of micro-ring resonators (MRRs) are studied following the implantation of gold (Au) ions and subsequent thermal annealing, at temperatures between 500 {\deg}C and 700 {\deg}C. Whilst we find that this process leads to the ready formation of Au nanoparticles (NPs) on the MRR surface, the cavity optical properties; Q-factor and extinction ratio (ER) are severely degraded, for annealing between 500 {\deg}C and 600 {\deg}C, but recover again for annealing at 650 {\deg}C. For an equivalent (control) MRR, which received no Au implantation, thermal annealing alone was also found to degrade the cavity performance.