Defect-Charge-Driven 90 Switching in HfO2
Abstract
Hafnium dioxide (HfO2) is a CMOS-compatible ferroelectric showing both 180 and 90 switching, yet the microscopic nature of the 90 pathway remains unresolved. We show that the 90 rotation pathway, negligible in pristine HfO2, becomes dominant under E// [111] when induced by charged oxygen vacancies. This pathway is more fatigue-resistant than the 180 reversal pathway, while delivering the same polarization change along [111] (2Pr=60 μC/cm2 ). This charge-driven switching arises from two factors: the crystal geometry of HfO2 and the intrinsic nature of rotational pathways, the latter suggesting a possible general tendency for defect charge to bias rotation over reversal in ferroelectrics. Together these findings reveal a pathway-level origin of fatigue resistance and establish defect charge as a general control parameter for polarization dynamics.
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