Specimen preparation for atom probe tomography analysis of complex multifunctional nanoparticles and nanostructures: state-of-the-art and challenges

Abstract

Atom probe tomography (APT) provides the three-dimensional composition of materials at near-atomic length scales, achieving detection limits in the range of tens of atomic parts-per-million regardless of element type. APT requires the specimen to be shaped as a needle with a tip radius of ~100 nm. The development of site-specific lift-out procedures using focused ion beam-scanning electron microscopy (FIB-SEM) has enabled APT analysis of multifunctional materials, advancing our understanding of their structure-composition-property relationships. Yet these approaches are not readily suitable for analyzing many nanomaterials. Co-electrodeposition of metallic films forms a composite containing the nanomaterials of interest, thereby facilitating APT specimen preparation and enabling analysis of nanowires, nanosheets, and nano- and microparticles, etc. In this perspective article, we showcase diverse examples from simple elementary to compositionally complex alloys of varying dimensionalities, from individual nanoparticles to aerogel structures. We emphasize the challenges encountered with specific material classes during co-electrodeposition procedures and provide recommendations for improving specimen preparation protocols to enhance measurement yield, thereby advancing APT analysis capabilities for optimizing the performance of functional nanomaterials.