Demonstration of a Field-Effect Three-Terminal Electronic Device with an Electron Mobility Exceeding 40 Million cm2/(Vs)
Abstract
We report the fabrication and operation of a source-drain-gate three-terminal field-effect electronic device with an electron mobility exceeding 40× 106 cm2 / (Vs). Several devices were fabricated, with the highest achieved electron mobility obtained using a symmetrically-doped GaAs/AlGaAs quantum well forming a two-dimensional electron gas (2DEG) with a density of 1.47(1) × 1011 cm-2 and a pristine, pre-fabrication electron mobility of 44(2) × 106 cm2/(Vs). To circumvent the well-known degradation of electron mobility during fabrication, devices were fabricated using a flip-chip technique where all lithographic processing steps were performed on a separate sapphire substrate. This method demonstrates the successful operation of various gate assembly designs on distinct 2DEGs without observable mobility degradation. This advance doubles the previous record for field-effect electronic device mobility and enables access to new regimes of quantum transport and applications that were previously unfathomable due to mobility limitations.
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