Mobile charges in MoS2/high-k oxide transistors: from abnormal instabilities to memory-like dynamics

Abstract

MoS2 field-effect transistors (FETs) with high-k oxides currently lag behind silicon standards in bias and temperature stability due to ubiquitous border oxide traps that cause clockwise (CW) hysteresis in gate transfer characteristics. While suppressing this effect is typically mandatory for logic FETs, here we explore an alternative strategy where the initial CW hysteresis can be dynamically overcome by stronger counterclockwise (CCW) hysteresis towards memory-like dynamics. We systematically compare hysteresis in similar back-gated MoS2/HfO2 and MoS2/Al2O3 FETs up to 275 C. At room temperature, both devices initially show sizable CW hysteresis. However, at 175 C MoS2/HfO2 FETs exhibit dominant CCW dynamics coupled with self-doping and negative differential resistance (NDR) effects. Our compact model suggests that this behavior is caused by the drift of mobile oxygen vacancies (V\(O+\) or V\(O2+\)) within HfO2 which also causes negative Vth shift under a constant positive bias stress. This alternative mechanism effectively overrides the initial CW hysteresis and enables intrinsic memory functionality that can be enhanced by using narrower gate bias sweep ranges. In contrast, the MoS2/Al2O3 FETs display only minor CCW dynamics even at 275 C due to higher drift activation energies for the same vacancies, thereby maintaining superior stability. Our results reveal an insulators selection paradigm: Al2O3 layers are better suited to suppress detrimental negative Vth shifts in MoS2 logic FETs at high temperatures, whereas their HfO2 counterparts can serve as active memory layers that would exploit these abnormal instabilities.

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