Synchrotron-radiation X-ray topography and reticulography of bulk β-Ga2O3 crystals grown by the cold crucible method
Abstract
The structural properties of a β-Ga2O3 single crystal grown by the oxide crystal growth from cold crucible (OCCC) method were investigated using synchrotron radiation X-ray topography and X-ray reticulography. The region grown beneath the seed exhibits high crystalline quality with a rocking curve full width at half maximum of about 26 arcsec. During diameter enlargement, a twist-type lattice misorientation develops between the central and laterally expanded regions, originating near the shoulder and propagating along boundaries parallel to the 010 growth direction. Dislocation analysis reveals that 010-oriented screw dislocations dominate the defect structure with densities of ~105cm-2, while higher densities (~106cm-2) appear in the wing region. These results clarify defect formation in OCCC-grown β-Ga2O3 and provide insights for optimizing growth conditions.
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