Determination of Burgers vectors of dislocations in monoclinic β-Ga2O3 crystals by large-angle convergent-beam electron diffraction

Abstract

We demonstrate the applicability of large-angle convergent-beam electron diffraction (LACBED) for Burgers vector determination in monoclinic β-Ga2O3. The inner product g · b in this non-orthogonal system can be evaluated without a metric tensor by using the dual relationship between real and reciprocal lattice bases. Based on this framework, Burgers vectors of dislocations introduced by nanoindentation were unambiguously determined from LACBED node counts. The results are consistent with weak-beam dark-field imaging, confirming the effectiveness of LACBED for β-Ga2O3.

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