Design strategies for efficient, fabrication-feasible extreme-ultraviolet metalens

Abstract

The concept of metasurfaces was recently applied to the extreme ultraviolet (EUV) spectral regime, providing a new opportunity for transmissive focusing elements in a regime where materials are highly lossy. The realization of metalenses in the EUV, however, is challenging due to the optical losses and low refractive index contrast of available materials, as well as the larger-than-wavelength periodicity of metaatom arrays imposed by fabrication limits. In this paper, we propose alternative EUV metalens design strategies, including layout schemes and metaatom mapping rules. We demonstrate that the focusing efficiency can be roughly doubled compared with the simple square-lattice design of an EUV metalens purely by using an alternative semi-analytical design approach without reducing the metasurface's minimum feature size. The proposed strategies are generally applicable to metaoptics design for efficiency improvement when metaatoms are lossy or induce diffraction orders.