Surface Modification for III-V Selective Area Molecular Beam Epitaxy of Non-Selective Mask Materials

Abstract

Selective-area embedded regrowth of III-V semiconductors by molecular beam epitaxy enables the seamless integration of metals and dielectrics into crystalline material for novel design of optoelectronic devices. However, traditional masks like $SiO_2$ and $Si_{3}N_{4}$ limit the design of high-contrast photonics in the infrared due to their high extinction coefficients at technologically relevant wavelengths. Consequently, there is a need to explore alternative mask materials to expand the selective area molecular beam epitaxy capabilities beyond those traditionally used. This study evaluates the deposition selectivity of the alternative materials $Al_{2}O_{3}$, $TiO_2$, and $HfO_2$, films with preferable spectral responses but higher surface reactivity. It was found that $Al_{2}O_{3}$ exhibits promising selective growth characteristics within typical GaAs growth temperatures, $HfO_2$ demonstrated a high non-selectivity dominated by Ga adsorption on the mask at temperatures up to 650 $^\circ$C, and $TiO_2$ proved reactive during deposition. To achieve selective growth of highly non-selective and even reactive mask materials, a surface modification technique was employed to improve the selective growth characteristics of any given film. Selective growth of $Si_{3}N_{4}$ and $TiO_2$ films was achieved with the application of a thin $SiO_2$ capping layer utilizing growth conditions typical of the GaAs/$SiO_2$ system. The relationship between the thickness of $SiO_2$ caps and growth selectivity was examined, revealing that sub-1 nm capping layers can significantly influence the mask surface chemistry, indicating that by depositing a thin layer of $SiO_2$, $SiO_2$-like selectivity for any mask material can be realized without degrading its optical response.