Resolving the Blueshift in Calculations of the EUV Spectrum of Multiply Charged Tin Ions

Abstract

We report ab initio relativistic calculations on the complex open shell Sn$^{12+}$ highly charged ion, a prototypical plasma ion relevant for extreme ultraviolet (EUV) nanolithography. Previous calculations of EUV emissivity in tin plasmas consistently generate a spectrum in which the region of peak emissivity is blueshifted relative to experiment. By optimising our numerical methods to take full advantage of modern, high-performance CPU architectures, we are able to completely saturate the configuration interaction within the $n=4$ shell. Coupled with a thorough treatment of core-valence correlation we resolve the blueshift, finding a surprisingly large influence of highly excited states on the spectrum that is dominated by multiply excited states.